Course Contents
Introduction of Thin Films
Vacuum Technology
Measurement of Vacuum using Gauges
Deposition Techniques
Applications of thin films:
Course Synopsis
Introduction of Thin Films: What is Thin film, Why a thin film, How thin film, Need for thin films, requirements, applications in modern technology: Vacuum Technology Measurement of Vacuum using Gauges: Why do we need vacuums, Production of Vacuum , Vacuum pumps ( Rotary pump, Oil diffusion pump, cryogenic pump, Booster pump, Turbo molecular pump and sputter ion pump), Measurement of vacuums (Thermo couple vacuum gauge, Piranni gauge, Bayeral gauge), Applications of vacuum technology, Construction and working of vacuum, evaporation system. Deposition Techniques: Physical Vapor deposition (evaporation), Basic requirement of evaporation, Important properties of evaporates, Heating methods (Resistive heating, electron beam bombardment method, RF heating and flash evaporation, Vapor sources(wire, sheet and credible), Emission characteristics of vapor sources(Point sources ad surface sources), Film thickness measurements and thickness variation for both point source and surface sources. Nucleation, Growth and structure of vacuum evaporated thin film, Sputtering, Glow discharge, RF Sputtering, RF magnetron sputtering, Chemical vapor deposition (CVD), Some chemical reactions of CVD, Electroplating, Anodization, Hydrothermal evaporation, Pulsed Laser deposition, Active and Passive Applications of thin films: Thin film resistors, capacitors, diodes’, Transistors, Anti refrigeration of thin films, filters and beam splitters
Course Learning Outcomes
The students gain experience in handling high vacuum equipment and using thin film growth techniques which to enables them to work at production units related to optical, mechanical, electronic coatings etc. They acquire range of basic knowledge and practical skills required to act as responsible for making scientific decisions and to accomplish tasks related to the
development, production, processing, of coating materials and solve routine problems as well as unpredictable contexts.
Material Science of thin films
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Book Title : HANDBOOK OF THIN-FILM DEPOSITION PROCESSES AND TECHNIQUES
Author : Krishna Seshan
Edition : second edition
Publisher : WILLIAM ANDREW PUBLISHING
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Title : HANDBOOK OF THIN-FILM DEPOSITION PROCESSES AND TECHNIQUES
Type : Reference Book
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